Scanning electron microscopy and related techniques in application to materials characterization

The Scanning Electron Microscopy (SEM) supported with the Energy-Dispersive X-Ray Spectrometry (EDS) and Electron Backscatter Diffraction(EBSD) is considered as a common technique in characterization of structural properties and composition of materials. When combined with Focused Ion Beam (FIB) technology may be used for FIB-TEM sample preparation, patterning of complex structures and sectioning for high-resolution imaging.